CLB Series Low Frequency RF Power Supplies

CLB Series Low Frequency RF Power Supplies

XP Comdel's Superior Design and Reliability in a Small, Lightweight Package

The CLB series incorporates all of the features and innovations developed in the previous CLF series with the added advantage of lighter weight and smaller size. 

Performance

RF generators from the CLB product family are available in power ranges from 2500 to 12,000 Watts at a single frequency in the 20 kHz to 2 MHz band. The Turbotune Technology within the unit allows frequency tuning by automatically varying its output frequency +/-10% around its nominal frequency. The solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership. The design of the CLB series is based on XP Comdel's proven RF amplifier technology.
 

Models
Model Name

CLB3000

Output Power / Frequency
3000W,  
20kHz - 2MHz
Dimensions

5"H x 17"W x 16"D
(12.7cm x 43.2cm x 40.6cm)

Weight

63 lbs.
(29 kg)

Cooling

Water: 2 GPM
(7.6 liters)

Line Voltage

208/230/400/440/480VAC; three phase

Line Current

12A/11A/6A/5A/5A typical

Standard Output Connectors

N, C, HN, LC or 7/16

Model Name

CLB5000

Output Power / Frequency
5000W,  
20kHz - 2MHz
Dimensions

7"H x 19"W x 22"D
(17.8cm x 48.3cm x 56cm)

Weight

95 lbs.
(43 kg)

Cooling

Water: 3 GPM
(11.4 liters)

Line Voltage

208/230/400/440/480VAC; three phase

Line Current

24A/22A/12A/10A/10A typical

Standard Output Connectors

N, C, HN, LC or 7/16

Features
  • Small, lightweight packaging
  • Standard power ranges: 2500, 3000, 5000, 6000, 12,000 Watts
  • Any single frequency from 20 kHz to 2 MHz, varying +/-10%
  • Phase lock tuning or software algorithm
  • Designed to meet ETL and SEMI F47 directives
  • Forward or Delivered power mode regulation
Applications

The CLB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.

Specifications
  • Frequency: Any single frequency from 20 kHz to 2 MHz, varying +/-10%
  • Line frequency: 50/60 Hz
  • Analog power command: 0-10 VDC for 0 to maximum output
  • Standard power accuracy:  2 % (higher accuracies available)
  • Standard power linearity:   2% of setting at power levels above 10% of rated power
  • Power repeatability: +/- 1% of setpoint into a 50-ohm load
  • Control I/O connector: Standard: 25-pin subminiature D type (female), Optional: 15-pin subminiature D type (female)
  • Harmonic distortion: Less than -40 dBc
  • Reflected power limit: 20% of full scale typical
Options
  • High accuracy, low output control
  • Internal fixed match
  • DeviceNet