CLX Series Low Frequency RF Power Supplies

CLX Series

Proven Reliability in Plasma Vacuum Systems Worldwide

The CLX series low frequency RF power supplies are available in power ranges from 600 to 12,000 Watts with fixed frequencies from 20 kHz to 2 MHz.  A frequency agile option allows fast frequency timing to some loads. The conservatively rated solid-state design provides low cost of ownership with high reliability.

Performance

The CLX series low frequency RF power supplies are available in power ranges from 600 to 12,000 Watts with fixed frequencies from 20 kHz to 2 MHz.  A frequency agile option allows fast frequency timing to some loads. The conservatively rated solid-state design provides low cost of ownership with high reliability.
 

Models
Model Name

CLX10000

Output Power / Frequency
10kW,  
20kHz - 2MHz
Dimensions

5.25"H x 19"W x 24"D
(13.3cm x 48.3cm x 61cm)

Weight

60 lbs.
(27 kg)

Cooling

Water: 4 GPM
(15.1 liters)

Control I/O Connector

25-pin subminiature D type (male)

Line Voltage

187-229VAC; three phase;

Line Current

50/60 Hz / 50A typical

Standard Output Connectors

LC or 7/16

Harmonic Output

Less than -40dBc

Certification

ETL Marked, Semi F47

Features
  • Reliable amplifier design with millions of trouble-free hours driving plasma systems worldwide
  • Local control via encoder and softkey inputs
  • Standard RS-232 and analog/digital control
  • Control circuitry ensures consistency during high VSWR conditions
  • Unique power monitoring measures delivered power into any impedance load
  • Active front panel with full controls and programmable microprocessor
Applications

The CLX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. CVD and PVD, as well as induction and dielectric heating processes in industrial systems. Other applications include induction heating and ultrasonic welding. 

Specifications
  • Power control: 0-10 VDC input for 0 to maximum-rated output
  • Power control linearity: ≤ 2% of setting at power levels above 10% of rated power
  • Frequency: Any fixed frequency from 20 kHz to 2 MHz* (optional frequency agility +/- 10% of center frequency)
  • Frequency stability: 350 kHz +/- 1%

*CLX 600/H Frequency: Any fixed frequency from 20 kHz to 800 kHz

Options
  • Wide range of AC input line voltages available
  • Master/Slave operation
  • Turbotune Technology providing unique frequency tuning
  • DeviceNet