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Single Frequency RF Power Supplies Dual Frequency RF Power Supplies The CDX dual frequency power supply comes in a 1000 or 2000 Watt design. The high frequency (HF) section provides 600 or 1000 Watts of power, with optional frequencies from 2 to 60 MHz. The low frequency (LF) section can deliver 600 or 1000 Watts, with optional fixed or variable frequencies ranging from 20 kHz to 13.56 MHz. DC Generators The XDC generators provide reliable DC power in a compact, lightweight design ESC Electrostatic Chuck Power Supplies These compact, lightweight ESC power supplies come complete with NRTL product safety marks, CE certification, built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications. Multi Channel Synthesizer Modules The VF series multi channel synthesizer modules provide phase adjustable output to avoid destructive arcing and cross-talk in multiple cathode plasma processing chambers. Match Pro Impedance Matching Networks The Match Pro adjusts input impedance to 50 ohms quickly, accurately and dependably--in response to the changes in load characteristics during your process.
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